While working at Nippon Telegraph and Telephone (NTT) in mid-1980s Japan, engineer Hiroo Kinoshita first proposed the concept of EUV. He tested the idea and successfully demonstrated the first EUV …

EUV lithography is important because it makes scaling more affordable for chipmakers and allows the semiconductor industry to continue its pursuit of Moore’s Law. EUV systems are used to print the …

Jul 14, 2025 · In this article, we’ll break down the real technical and practical differences between DUV and EUV photolithography — and why EUV isn’t simply an upgrade, but a fundamental shift in how …

Executive Summary One of the main advancements in semiconductor manufacturing is using extreme ultraviolet (EUV) light (13.5 nm wavelength) for lithography. EUV light allows smaller features to be …

Sep 2, 2025 · EUV lithography is a cornerstone of modern semiconductor manufacturing, allowing the production of microchips that are smaller, faster, and more efficient than their predecessors.

EUV stands for "extreme ultraviolet" light. The light visible to humans has wavelengths between 400 and 800 nanometers. The range of ultraviolet light begins below 400 nanometers. The leading lithography …

Nov 28, 2024 · Extreme ultraviolet lithography (EUVL) was recently adopted by the semiconductor industry as the leading-edge lithography technique for continued miniaturization of semiconductor …

Jun 26, 2023 · In the case of EUV (or extreme ultraviolet) lithography, the light used is well beyond the visible light spectrum, with wavelengths only about 13 nanometers wide.

Nov 20, 2025 · EUV lithography machines are famously made by just a single firm, ASML in the Netherlands, and determining who has access to the machines has become a major geopolitical …

Extreme ultraviolet lithography (EUV) is an advanced technique essential for the production of semiconductor chips, which are integral to a wide range of electronic devices, from smartphones to …